The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 02, 2014

Filed:

Jul. 16, 2009
Applicants:

Imran Hashim, Saratoga, CA (US);

Sandra Malhotra, San Jose, CA (US);

Ryan Clarke, San Jose, CA (US);

Sunil Shanker, Santa Clara, CA (US);

Yun Wang, San Jose, CA (US);

Yoram Schwarz, Santa Clara, CA (US);

Inventors:

Imran Hashim, Saratoga, CA (US);

Sandra Malhotra, San Jose, CA (US);

Ryan Clarke, San Jose, CA (US);

Sunil Shanker, Santa Clara, CA (US);

Yun Wang, San Jose, CA (US);

Yoram Schwarz, Santa Clara, CA (US);

Assignee:

Intermolecular, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/00 (2006.01); H01L 45/00 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 22/20 (2013.01); H01L 45/126 (2013.01); H01L 45/16 (2013.01); H01L 45/144 (2013.01); H01L 45/06 (2013.01); H01L 45/1233 (2013.01); H01L 22/14 (2013.01);
Abstract

A combinatorial screening method and system are provided. The combinatorial system and method provide rapid data generation for characterization of phase change material. The characterization data is collected through a multipoint probe card where multiple regions are characterized in a single annealing cycle.


Find Patent Forward Citations

Loading…