The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
Jul. 14, 2011
Nobuaki Matsuoka, Koshi, JP;
Akira Miyata, Koshi, JP;
Shinichi Hayashi, Koshi, JP;
Suguru Enokida, Koshi, JP;
Nobuaki Matsuoka, Koshi, JP;
Akira Miyata, Koshi, JP;
Shinichi Hayashi, Koshi, JP;
Suguru Enokida, Koshi, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
In one embodiment, a coating and developing apparatus is provided with transfer units, provided between a stack of early-stage processing unit blocks and a stack of later-stage processing unit blocks to transfer a substrate between the transport mechanisms of laterally-adjacent unit blocks, and a vertically-movable auxiliary transfer mechanism for transporting a substrate between the transfer units. A stack of first developing unit blocks is stacked on the stack of early-stage processing unit blocks, and a stack of second developing unit blocks is stacked on the stack of later-stage processing unit blocks.