The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
Jun. 20, 2011
Josef Biberger, Wildenberg, DE;
Ralph Pulwey, Aalen, DE;
Jaroslaw Paluszynski, Oberkochen, DE;
Dietmar Doenitz, Aalen, DE;
Hans Mathèe, Heidelberg, DE;
Michael Steigerwald, Westhausen, DE;
Josef Biberger, Wildenberg, DE;
Ralph Pulwey, Aalen, DE;
Jaroslaw Paluszynski, Oberkochen, DE;
Dietmar Doenitz, Aalen, DE;
Hans Mathèe, Heidelberg, DE;
Michael Steigerwald, Westhausen, DE;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
A method of processing of an object comprises scanning a particle beam across a surface of the object and detecting electrons emerging from the object due to the scanning; determining a height difference between the surface of the object and a predetermined surface for each of plural of locations on the surface of the object based on the detected electrons; determining a processing intensity for each of the plural locations on the surface of the object based on the determined height differences; and directing a particle beam to the plural locations based on the determined processing intensities, in order to remove material from or deposit material on the object at the plural locations.