The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2014
Filed:
Feb. 03, 2010
Theodorus Petrus Maria Cadee, Vlierden, NL;
Noud Jan Gilissen, 's-Gravenzande, NL;
Rene Theodorus Petrus Compen, Valkenswaard, NL;
James Kennon, Benicia, CA (US);
Theodorus Petrus Maria Cadee, Vlierden, NL;
Noud Jan Gilissen, 's-Gravenzande, NL;
Rene Theodorus Petrus Compen, Valkenswaard, NL;
James Kennon, Benicia, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic projection apparatus includes a beam production system to provide a beam of radiation, pattern the beam of radiation, and project the patterned beam onto a target portion of a substrate, a support table including protrusions to support an article, a detector to detect height deviations of the protrusions, a material removing device arranged to modify a height of the protrusion material, a controller coupled between the detector and the material removing device, wherein material removing device includes a removal tool selected from the group consisting of a mechanical polishing device, a magneto rheological finishing tool, and a single or multipoint diamond tool.