The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2014
Filed:
Apr. 27, 2009
Yutaka Kadowaki, Kanagawa, JP;
Tomoko Saitou, Kanagawa, JP;
Keng Weng Lim, Kanagawa, JP;
Katsuhiko Mushiake, Chiba, JP;
Yutaka Kadowaki, Kanagawa, JP;
Tomoko Saitou, Kanagawa, JP;
Keng Weng Lim, Kanagawa, JP;
Katsuhiko Mushiake, Chiba, JP;
ULVAC, Inc., Kanagawa, JP;
Abstract
Provided herein are a water-reactive Al composite material which comprises 4NAl or 5NAl, as an Al raw material, containing, on the basis of the amount of the Al raw material, added Bi in an amount ranging from 0.8 to 1.4% by mass and Si, including the Si as an impurity of the Al raw material, in a total amount ranging from 0.25 to 0.7% by mass; a thermally sprayed Al film produced using this Al composite material; a method for the production of this Al film; and a constituent member for a film-forming chamber, which is provided, on the surface, with the thermally sprayed Al film.