The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 19, 2014

Filed:

Oct. 03, 2011
Applicants:

Futoshi Shimai, Kawasaki, JP;

Tsutomu Sahoda, Kawasaki, JP;

Akihiko Sato, Kawasaki, JP;

Kenji Maruyama, Kawasaki, JP;

Inventors:

Futoshi Shimai, Kawasaki, JP;

Tsutomu Sahoda, Kawasaki, JP;

Akihiko Sato, Kawasaki, JP;

Kenji Maruyama, Kawasaki, JP;

Assignee:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C 5/02 (2006.01); B05B 13/02 (2006.01); B05C 5/00 (2006.01); B05B 13/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B05C 5/0208 (2013.01); B05C 5/02 (2013.01); H01L 21/6715 (2013.01); H01L 21/67011 (2013.01); B05B 13/02 (2013.01);
Abstract

Provided is a coating device including: a rotating part which rotatably holds a substrate while the substrate is upright; a cup portion disposed to surround an outer periphery of the substrate held by the rotating part and having an opening which exposes a first surface and a second surface of the substrate; a coating part which includes a nozzle ejecting a liquid material to the first surface and to the second surface of the substrate through the opening; and a cover portion which is provided on the first surface and the second surface sides of the substrate and by which the opening is opened and closed.


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