The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2014
Filed:
Oct. 16, 2009
Osamu Wakabayashi, Hiratsuka, JP;
Akira Endo, Jena, DE;
Krzysztof Nowak, Oyama, JP;
Takashi Suganuma, Yuki, JP;
Masato Moriya, Hiratsuka, JP;
Osamu Wakabayashi, Hiratsuka, JP;
Akira Endo, Jena, DE;
Krzysztof Nowak, Oyama, JP;
Takashi Suganuma, Yuki, JP;
Masato Moriya, Hiratsuka, JP;
Gigaphoton Inc., Tochigi, JP;
Abstract
An extreme ultraviolet light source apparatus comprises a laser apparatus having a master oscillator outputting one or more longitudinal-mode-laser lights, an amplifier with a molecular gas as an amplifying agency amplifying a longitudinal-mode laser light of which wavelength is included in one of amplifiable lines, and a controller adjusting the master oscillator so that the wavelength of the longitudinal-mode laser light outputted from the master oscillator is included in one of the amplifiable lines, the laser apparatus being used as a driver laser, wherein the laser apparatus irradiates a target material with a laser light for generating plasma, and the extreme ultraviolet light is emitted from the plasma and outputted from the extreme ultraviolet light source apparatus.