The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 12, 2014

Filed:

Nov. 28, 2012
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Jean-Baptiste Laloe, Saratoga Springs, NY (US);

Huang Liu, Mechanicville, NY (US);

Wonwoo Kim, Malta, NY (US);

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

One illustrative gate structure for an NFET device includes a gate insulation layer formed above a semiconducting substrate, a first metal layer comprised of titanium nitride (TiN) positioned above the gate insulation layer, a second metal layer comprised of tantalum nitride (TaN) positioned above the first metal layer, a third metal layer comprised of titanium aluminum (TiAl) positioned above the second metal layer, a fourth metal layer comprised of an aluminum-containing material positioned above the third metal layer, a fifth metal layer comprised of titanium positioned above the fourth metal layer, and a layer of aluminum positioned above the fifth metal layer.


Find Patent Forward Citations

Loading…