The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2014
Filed:
Jul. 27, 2009
Hideaki Sato, Tosu, JP;
Hiromi Hara, Tosu, JP;
Hideaki Sato, Tosu, JP;
Hiromi Hara, Tosu, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
In a heating unit, based on a required output amount Q, a control partperforms: (A) when the required output amount Q is not more than a predetermined set value, a control in which none of the heating devicesis continuously kept on throughout a heating cycle, and all or one or more heating devicesare controlled in a periodically divided manner; and (B) when the required output amount is larger than the predetermined set value, a control in which all or one or more heating devicesare continuously kept on throughout the heating cycle, and all or one or more heating devicesamong the remaining heating devicesare controlled in the periodically divided manner during this heating cycle. At this time, a difference between the maximum number and the minimum number of the heating devicesthat are simultaneously kept on during the heating cycle is made not more than 1.