The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2014
Filed:
Jun. 07, 2011
William Davis Lee, Newburyport, MA (US);
Gary M. Cook, Newton, MA (US);
Perry J. I. Justesen, Beverly, MA (US);
Ashwin M. Purohit, Gloucester, MA (US);
Robert D. Rathmell, Murphy, TX (US);
Allan D. Weed, Marblehead, MA (US);
William Davis Lee, Newburyport, MA (US);
Gary M. Cook, Newton, MA (US);
Perry J. I. Justesen, Beverly, MA (US);
Ashwin M. Purohit, Gloucester, MA (US);
Robert D. Rathmell, Murphy, TX (US);
Allan D. Weed, Marblehead, MA (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
A clamping device and method is provided for securing first and second workpieces having different sizes to a clamping device and providing thermal conditioning thereto. An electrostatic clamping plate having a diameter associated with the first workpiece surrounds a central portion of the clamp. A non-electrostatic central portion provides a heater within the annulus, wherein the central portion has a diameter associated with the second workpiece. A workpiece carrier is provided, wherein the workpiece carrier is configured to hold the second workpiece above the heater, and wherein a diameter of the workpiece carrier is associated with the electrostatic clamping plate annulus. The annulus selectively electrostatically clamps the workpiece carrier or a circumferential portion of the first workpiece to its clamping surface, therein selectively maintaining a position of the first or second workpiece with respect to the annulus or non-electrostatic central portion.