The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2014
Filed:
May. 26, 2009
Olav Johannes Seijger, Eindhoven, NL;
Martinus Joseph Kok, Eindhoven, NL;
Sander Kerssemakers, Eindhoven, NL;
Mark Johannes Magielsen, Veldhoven, NL;
Olav Johannes Seijger, Eindhoven, NL;
Martinus Joseph Kok, Eindhoven, NL;
Sander Kerssemakers, Eindhoven, NL;
Mark Johannes Magielsen, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A substrate table positioning device that is supported by four bearing elements is provided. The substrate table positioning device also includes a balance mass. Two of the bearing elements support the base frame in such a way that they can move in a vertical direction independently of the other bearing elements. This can be achieved by using a hinge. This structure of substrate table positioning device has a higher lowest Eigen frequency of oscillation than that of substrate table positioning devices supported by three bearing elements. As such, the balance mass is not excited by typical vibrations that occur in the lithographic apparatus. This enables better positional control of the substrate table. It also enables at least some of the dimensions of the frame elements of the balance mass to be reduced.