The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2014
Filed:
Jan. 20, 2011
Hiroyasu Shichi, Tokyo, JP;
Tohru Ishitani, Hitachinaka, JP;
Hidemi Koike, Hitachinaka, JP;
Kaoru Umemura, Musashino, JP;
Eiichi Seya, Kunitachi, JP;
Mitsuo Tokuda, Tachikawa, JP;
Satoshi Tomimatsu, Kokubunji, JP;
Hideo Kashima, Kokubunji, JP;
Muneyuki Fukuda, Kokubunji, JP;
Hiroyasu Shichi, Tokyo, JP;
Tohru Ishitani, Hitachinaka, JP;
Hidemi Koike, Hitachinaka, JP;
Kaoru Umemura, Musashino, JP;
Eiichi Seya, Kunitachi, JP;
Mitsuo Tokuda, Tachikawa, JP;
Satoshi Tomimatsu, Kokubunji, JP;
Hideo Kashima, Kokubunji, JP;
Muneyuki Fukuda, Kokubunji, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A sample fabricating method of irradiating a sample with a focused ion beam at an incident angle less than 90 degrees with respect to the surface of the sample, eliminating the peripheral area of a micro sample as a target, turning a specimen stage around a line segment perpendicular to the sample surface as a turn axis, irradiating the sample with the focused ion beam while the incident angle on the sample surface is fixed, and separating the micro sample or preparing the micro sample to be separated. A sample fabricating apparatus for forming a sample section in a sample held on a specimen stage by scanning and deflecting an ion beam, wherein an angle between an optical axis of the ion beam and the surface of the specimen stage is fixed and formation of a sample section is controlled by turning the specimen stage.