The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2014
Filed:
Jun. 25, 2009
Jianhui Wu, Westborough, MA (US);
Gilles Querel, Worcester, MA (US);
Eric Schulz, Worcester, MA (US);
Richard W. J. Hall, Southborough, MA (US);
Jianhui Wu, Westborough, MA (US);
Gilles Querel, Worcester, MA (US);
Eric Schulz, Worcester, MA (US);
Richard W. J. Hall, Southborough, MA (US);
Saint-Gobain Abrasives, Inc., Worcester, MA (US);
Saint-Gobain Abrasifs, Conflans-Sainte-Honorine, FR;
Abstract
A CMP pad conditioner including a substrate having a transparency window represented by an average internal transmittance of not less than about 90% over a wavelength range extending from about 400 nm to about 500 nm along a path length extending through the substrate of not less than about 10 mm a bonding layer overlying a surface of the substrate, and abrasive grains contained within the bonding layer.