The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2014
Filed:
Jul. 26, 2011
Shiyu Zhang, Hayward, CA (US);
Charles N. Wang, Santa Clara, CA (US);
Yevgeniy Churin, San Jose, CA (US);
Yong-mo Moon, San Ramon, CA (US);
Hyoseok Daniel Yang, Santa Clara, CA (US);
Mark S. Wang, San Ramon, CA (US);
Shiyu Zhang, Hayward, CA (US);
Charles N. Wang, Santa Clara, CA (US);
Yevgeniy Churin, San Jose, CA (US);
Yong-Mo Moon, San Ramon, CA (US);
Hyoseok Daniel Yang, Santa Clara, CA (US);
Mark S. Wang, San Ramon, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
One embodiment relates to an oblique illuminator. The oblique illuminator includes a light source emitting a light beam, a first reflective surface, and a second reflective surface. The first reflective surface has a convex cylindrical shape with a projected parabolic profile along the non-powered direction which is configured to reflect the light beam from the light source and which defines a focal line. The second reflective surface has a concave cylindrical shape with a projected elliptical profile which is configured to reflect the light beam from the first reflective surface and which defines first and second focal lines. The focal line of the first reflective surface is coincident with the first focal line of the second reflective surface. The first and second focal lines of the second reflective surface may be a same line in which case the elliptical curvature is a projected spherical profile. Other embodiments, aspects and features are also disclosed.