The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2014
Filed:
Mar. 23, 2011
Koji Hasegawa, Joetsu, JP;
Jun Hatakeyama, Joetsu, JP;
Takeshi Nagata, Joetsu, JP;
Seiichiro Tachibana, Joetsu, JP;
Takeshi Kinsho, Joetsu, JP;
Koji Hasegawa, Joetsu, JP;
Jun Hatakeyama, Joetsu, JP;
Takeshi Nagata, Joetsu, JP;
Seiichiro Tachibana, Joetsu, JP;
Takeshi Kinsho, Joetsu, JP;
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Abstract
The invention provides an acetal compound containing an adamantane ring having an alcoholic hydroxyl group which is protected with an acetal group having a carbonyl moiety of branched structure. A photoresist film comprising a polymer comprising recurring units derived from the acetal compound and an acid generator is characterized by a high dissolution contrast when it is subjected to exposure and organic solvent development to form an image via positive/negative reversal.