The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2014
Filed:
Aug. 12, 2013
Hitachi High-technologies Corporation, Tokyo, JP;
Naoya Saito, Kamisato-machi, JP;
Shinji Honma, Kamisato-machi, JP;
Teruaki Tokutomi, Kamisato-machi, JP;
Yoshinori Kitano, Kamisato-machi, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An apparatus for inspecting a thermal assist type magnetic head is configured to include a scanning probe microscope unit comprising a cantilever having a probe with a magnetic film formed on the surface of a tip portion thereof; a prober unit which provides an alternating current to a terminal formed on the thermal assist type magnetic head element; a scattered light detection unit which detects scattered light generated from the probe; and a signal process unit which detects defect by using an output signal from the scanning probe microscope unit by scanning the surface of the thermal assist type magnetic head element with the probe in a state that the magnetic field is generated and the near-field light is stopped, and an output signal from the scattered light detection unit by scanning the surface with the probe while near-field light is generated and the magnetic field is off.