The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2014
Filed:
Mar. 22, 2010
Seima Kato, Utsunomiya, JP;
Seima Kato, Utsunomiya, JP;
Canon Kabushiki Kaisha, , JP;
Abstract
A transmitted wavefront measuring method comprises the steps of emitting lightfrom a light sourceonto an object to be measuredto receive interfering light transmitted through the object and a diffraction gratingon a light receiving portiondisposed at a predetermined distance from the diffraction grating to measure an intensity distribution of the interfering light T, performing a Fourier transform of the intensity distribution to calculate a frequency distribution T, and obtaining a transmitted wavefront of the object based on a primary frequency spectrum in the frequency distribution Tto T. The step of obtaining the transmitted wavefront comprises the steps of performing an inverse Fourier transform of the primary frequency spectrum with reference to a grating frequency of the diffraction grating to calculate a complex amplitude of the interfering light T, and obtaining the transmitted wavefront based on the complex amplitude T