The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2014
Filed:
Jun. 21, 2010
Darryl Barlett, Dexter, MI (US);
Charles A. Taylor, Ii, Ann Arbor, MI (US);
Barry D. Wissman, Ann Arbor, MI (US);
Darryl Barlett, Dexter, MI (US);
Charles A. Taylor, II, Ann Arbor, MI (US);
Barry D. Wissman, Ann Arbor, MI (US);
k-Space Associates, Inc., Dexter, MI (US);
Abstract
A technique for determining the temperature of a sample including a semiconductor filmhaving a measurable optical absorption edge deposited on a transparent substrateof material having no measurable optical absorption edge, such as a GaN filmdeposited on an Al2O3 substratefor blue and white LEDs. The temperature is determined in realtime as the filmgrows and increases in thickness. A spectra based on the diffusely scattered light from the filmis produced at each incremental thickness. A reference division is performed on each spectra to correct for equipment artifacts. The thickness of the filmand an optical absorption edge wavelength value are determined from the spectra. The temperature of the filmis determined as a function of the optical absorption edge wavelength and the thickness of the filmusing the spectra, a thickness calibration table, and a temperature calibration table.