The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 22, 2014

Filed:

Dec. 11, 2013
Applicant:

Jeol Ltd., Tokyo, JP;

Inventors:

Hidetaka Sawada, Tokyo, JP;

Fumio Hosokawa, Tokyo, JP;

Assignee:

JEOL Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K 1/08 (2006.01); H01J 3/14 (2006.01); H01J 3/26 (2006.01); H01J 49/42 (2006.01);
U.S. Cl.
CPC ...
Abstract

The chromatic aberration corrector () has a first multipole element () for producing a first electromagnetic field and a second multipole element () for producing a second electromagnetic field. The first multipole element () first, second, and third portions () arranged along an optical axis (OA) having a thickness and producing a quadrupole field in which an electric quadrupole field and a magnetic quadrupole field are superimposed. In the first and third portions (), the electric quadrupole field is set stronger than the magnetic quadrupole field. In the second portion (), the magnetic quadrupole field is set stronger than the electric quadrupole field. The second portion () produces a two-fold astigmatism component that is opposite in sign to two-fold astigmatism components produced by the first portion () and third portion ().


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