The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2014
Filed:
Sep. 24, 2011
Applicant:
Arthur Hotzel, Dresden, DE;
Inventor:
Arthur Hotzel, Dresden, DE;
Assignee:
GLOBAL FOUNDRIES Inc., Grand Cayman, KY;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 1/24 (2012.01); G03F 1/72 (2012.01); G03F 1/84 (2012.01);
U.S. Cl.
CPC ...
G03F 1/72 (2013.01); G03F 7/7045 (2013.01); G03F 7/7065 (2013.01); G03F 7/70283 (2013.01); G03F 1/24 (2013.01); G03F 1/84 (2013.01); G03F 7/70466 (2013.01);
Abstract
Correction of reticle defects, such as EUV reticle defects, is accomplished with a second exposure. Embodiments include obtaining a reticle with a first pattern corresponding to a design for a wafer pattern, detecting dark defects and/or design/OPC weak spots in the first pattern, exposing a resist covered wafer using the reticle, and exposing the wafer using a second reticle with a second pattern or a second image field with openings corresponding to the dark defects, with a repair pattern on the reticle or on another reticle, or with a programmed e-beam or laser writer.