The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2014
Filed:
Sep. 19, 2011
Matthias Lang, Mögglingen, DE;
Ulrike Zeile, Heidenheim, DE;
Michael Albiez, Aalen, DE;
Wolfram Bühler, Hermaringen, DE;
Matthias Lang, Mögglingen, DE;
Ulrike Zeile, Heidenheim, DE;
Michael Albiez, Aalen, DE;
Wolfram Bühler, Hermaringen, DE;
Carl Zeiss NTS GmbH, Oberkochen, DE;
Abstract
An aperture unit for a particle beam device, in particular an electron beam device, is disclosed. Deposit supporting units are arranged at the aperture unit, with which deposit supporting units contaminations can be bound in such a way that the contaminations can no longer deposit at an aperture opening of the aperture unit. Coatings which can be arranged on the aperture unit make it possible to reduce interactions which cause contaminations to deposit at the aperture opening.