The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2014
Filed:
Oct. 25, 2011
Christiaan Alexander Hoogendam, Westerhoven, NL;
Martinus Agnes Willem Cuijpers, Veldhoven, NL;
Bart Friso Riedstra, Breda, NL;
Ronald Cornelis Gerardus Gijzen, Liempde, NL;
Maikel Cornelis Andreas Bruin, Enschede, NL;
Christiaan Alexander Hoogendam, Westerhoven, NL;
Martinus Agnes Willem Cuijpers, Veldhoven, NL;
Bart Friso Riedstra, Breda, NL;
Ronald Cornelis Gerardus Gijzen, Liempde, NL;
Maikel Cornelis Andreas Bruin, Enschede, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A leaf spring to be mounted between two objects, the leaf spring configured to have a high stiffness in two orthogonal directions, and a relative low stiffness in other degrees of freedom, wherein the leaf spring has a substantially panel-shaped body, the leaf spring including a first mounting location at or near the center of the panel-shaped body to mount the leaf spring to a first of the two objects, wherein the leaf spring includes one or more second mounting locations at or near the circumference of the panel-shaped body to mount the leaf spring to the second of the two objects, and elongate grooves and/or slits in the panel shaped body between the first mounting location and the second mounting location, the grooves and/or slits running in at least two non-orthogonal directions in the plane of the two orthogonal directions.