The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2014
Filed:
May. 25, 2009
Olav Johannes Seijger, Eindhoven, NL;
Martinus Joseph Kok, Eindhoven, NL;
Sander Kerssemakers, Eindhoven, NL;
Mark Johannes Magielsen, Veldhoven, NL;
Olav Johannes Seijger, Eindhoven, NL;
Martinus Joseph Kok, Eindhoven, NL;
Sander Kerssemakers, Eindhoven, NL;
Mark Johannes Magielsen, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An inspection apparatus for measuring a property of a substrate (W), includes a base frame, a substrate table () to hold the substrate, an illumination system arranged to direct a beam of radiation onto the substrate and a sensor arranged to detect radiation reflected off the substrate. Two balanced positioning systems displace the substrate table and sensor relative to the base frame in several directions. Each balanced positioning system includes a balance mass (), a bearing arrangement () to movably support the balance mass and tracks effective to guide the displacement in each direction. A motor arrangement causes the displacement in each direction. The balance mass is positioned relative to the track arrangement such that the centers of gravity of each balance mass and the substrate table or the sensor are substantially aligned in the direction substantially perpendicular to the plane including the direction of displacement.