The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2014
Filed:
Mar. 28, 2012
Jin Bong Shin, Chungcheongnam-do, KR;
Jin Ho Kim, Chungcheongnam-do, KR;
Dae Hyeon Shin, Seoul, KR;
Seung Jae Lee, Chungcheongnam-do, KR;
Jin Bong Shin, Chungcheongnam-do, KR;
Jin Ho Kim, Chungcheongnam-do, KR;
Dae Hyeon Shin, Seoul, KR;
Seung Jae Lee, Chungcheongnam-do, KR;
Korea Kumho Petrochemical Co., Ltd., Seoul, KR;
Abstract
A resist resin composition includes 100 parts by weight of a copolymer represented by Formula 3 below; 0.5 to 1.5 parts by weight of a photoacid generator and 700 to 1,500 parts by weight of a solvent: wherein R, R, and Rare each independently a Calkyl group, a Ccycloalkyl group, an ether group, an ester group, a carbonyl group, an acetal group, an epoxy group, a nitrile group, or an aldehyde group, R, R, and Rare each independently hydrogen or a methyl group, and l, m, n, and o each independently refer to the number of repeating units in a main backbone and satisfy the conditions: l+m+n+o=1, 0≦l/(l+m+n+o)<0.4, 0<m/(l+m+n+o)<0.6, 0≦n/(l+m+n+o)<0.6, and 0<o/(l+m+n+o)<0.4.