The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2014
Filed:
Feb. 11, 2011
Naoaki Yamashita, Kamisato, JP;
Toshimitsu Shiraishi, Kamisato, JP;
Koji Tsushima, Kamisato, JP;
Masashi Aoki, Kamisato, JP;
Naoaki Yamashita, Kamisato, JP;
Toshimitsu Shiraishi, Kamisato, JP;
Koji Tsushima, Kamisato, JP;
Masashi Aoki, Kamisato, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
In a method for transcripting fine patterns and an apparatus for transcripting fine patterns, the ingress of bubbles is prevented and patterns are transcripted with a high throughput by a relatively compact apparatus. For this purpose, a back surface of a stamper is vacuum sucked and the stamper is brought into close contact with a target of transcription with its surfaces coated with resist and pressure is applied thereto. At this time, the stamper is deformed into a spherical shape or bent to expand the close contact face from a central area to a peripheral area to prevent the ingress of air bubbles into between the target of transcription and the stamper.