The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2014
Filed:
Oct. 27, 2010
Eitan Kidron, Hod Hasharon, IL;
Eitan Kidron, Hod Hasharon, IL;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
A method and a stage structure for use in a vacuum environment, the stage structure includes a first low-outgassing plate and first high-outgassing associated components that are encapsulated by first low-outgassing covering elements, wherein the first low-outgassing plate is arranged to be coupled to a first motor that is arranged to move the first low-outgassing plate along a first direction, an outgassing level of each of the first low-outgassing plate and the first low-outgassing covering elements does not exceed a tolerable level of outgassing in the vacuum environment, and an outgassing level of each first high-outgassing associated component is above the tolerable level of outgassing in the vacuum environment.