The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2014
Filed:
Jun. 06, 2011
Lung-tai Chen, Kaohsiung, TW;
Yu-wen Hsu, Tainan, TW;
Tzong-che Ho, Hsinchu, TW;
Li-chi Pan, Hsinchu County, TW;
Lung-Tai Chen, Kaohsiung, TW;
Yu-Wen Hsu, Tainan, TW;
Tzong-Che Ho, Hsinchu, TW;
Li-Chi Pan, Hsinchu County, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
A sensing device can be provided with sealed and open-type chambers in various conditions for accommodating different types of sensing structural components by stacking multiple substrates, wherein the condition of a sealed chamber depends on condition taken in substrate bonding process. Owing to sealing a channel of the sealed chamber by the substrate, superior sealing performance is achieved as compared to those adopting solder or sealing material, and thus the condition of the sealed chamber can be finely controlled.