logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8760622 B1

PDFFull Text
Expired
Date of Patent:
Jun. 24, 2014

Filed:

Dec. 10, 2008

Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing method

Applicant:

Susumu Makinouchi, Zuma, JP;

Inventor:

Susumu Makinouchi, Zuma, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Toan Ton

Assistant Examiner:

Christina Riddle

Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/58 (2006.01); G03B 27/62 (2006.01); G03B 27/52 (2006.01); G03B 27/54 (2006.01); G03B 27/32 (2006.01);
U.S. Cl.
CPC ...
Abstract

A movable body apparatus is equipped with a Y measuring system equipped with an encoder and an interferometer that measure the position of a stage in one axis (Y-axis) direction. The interferometer irradiates a reflection surface arranged on the stage with a measurement light close to a measurement light of the encoder, and receives its reflected light. In this case, the encoder and the interferometer commonly use an optical member fixed to the stage. Accordingly, the Y interferometer and the Y encoder have substantially the equal measurement axis.

Find Patent Forward Citations

Makinouchi, Susumu. (2014). Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing method (U.S. Patent No. 8760622). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8760622

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…