The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2014
Filed:
Mar. 11, 2011
Toshihiro Nishisaka, Hiratsuka, JP;
Yukio Watanabe, Hiratsuka, JP;
Tamotsu Abe, Odawara, JP;
Osamu Wakabayashi, Hiratsuka, JP;
Toshihiro Nishisaka, Hiratsuka, JP;
Yukio Watanabe, Hiratsuka, JP;
Tamotsu Abe, Odawara, JP;
Osamu Wakabayashi, Hiratsuka, JP;
Gigaphoton Inc., Tochigi, JP;
Abstract
A chamber apparatus used with an external apparatus having an obscuration region may include: a chamber in which extreme ultraviolet light is generated; a collector mirror provided in the chamber for collecting the extreme ultraviolet light; a support for securing the collector mirror to the chamber; and an output port provided to the chamber for allowing the extreme ultraviolet light collected by the collector mirror to be introduced therethrough into the external apparatus.