The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2014
Filed:
Feb. 11, 2011
Josef Biberger, Wildenberg, DE;
Ralph Pulwey, Aalen, DE;
Josef Biberger, Wildenberg, DE;
Ralph Pulwey, Aalen, DE;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
A particle beam system includes a particle beam source for generating a particle beam, a high voltage source, a beam blanker system with deflection plates, and a control circuit. The control circuit provides a first current pathbetween the two deflection plates, wherein a switch, a nodeconnected to the high voltage source and a switchare arranged in this order in the first current path starting from the deflection plate. The control circuit provides a second current pathbetween the deflection plateand the deflection plate, wherein in the second current path, starting from the deflection plate, a series connectioncomprising a voltage sourcea switch, a nodeconnected to the high voltage source and a series connectioncomprising a voltage sourceand a switchare arranged in this order.