The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2014
Filed:
Mar. 17, 2011
Dirk Zeidler, Oberkochen, DE;
Ulrike Zeile, Heidenheim, DE;
Dirk Zeidler, Oberkochen, DE;
Ulrike Zeile, Heidenheim, DE;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
A combined inspection system for inspecting an object disposable in an object plane, comprises a particle-optical system, which provides a particle-optical beam path, and a light-optical system, which provides a light-optical beam path; and a controller, wherein the light-optical system comprises at least one light-optical lensarranged in the light-optical beam, which comprises a first lens surface facing the object plane which has two lens surfacesand a through hole, wherein the particle-optical system comprises a beam deflection device, in order to scan a primary particle beamover a part of the sample plane, and wherein the controller is configured to control the beam deflection devicein such a manner that a deflected primary particle beamintersects an optical axisof the particle-optical beam path in a plane which is arranged inside the through hole.