The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2014
Filed:
Mar. 12, 2012
Applicants:
Mitsuo Satou, Tokyo, JP;
Tomohiro Kakizawa, Tokyo, JP;
Inventors:
Mitsuo Satou, Tokyo, JP;
Tomohiro Kakizawa, Tokyo, JP;
Assignee:
JSR Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/40 (2006.01); C08F 18/20 (2006.01); C08F 26/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A radiation-sensitive resin composition includes a first polymer, a second polymer and a radiation-sensitive acid generator. The first polymer includes a repeating unit (I) shown by the following general formula (1), a fluorine atom in a molecule of the first polymer. The second a polymer includes an acid-labile group, and is insoluble or scarcely soluble in an alkali. Rrepresents a hydrogen atom or the like, each of Xand Rrepresents a single bond or the like, Rrepresents a hydrogen atom or the like, and Rrepresents an acid-labile group.