The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2014
Filed:
Jan. 25, 2012
Jennifer Y. Sun, Sunnyvale, CA (US);
LI Xu, San Jose, CA (US);
Kenneth S. Collins, San Jose, CA (US);
Thomas Graves, Los Altos, CA (US);
Ren-guan Duan, San Jose, CA (US);
Senh Thach, Union City, CA (US);
Jennifer Y. Sun, Sunnyvale, CA (US);
Li Xu, San Jose, CA (US);
Kenneth S. Collins, San Jose, CA (US);
Thomas Graves, Los Altos, CA (US);
Ren-Guan Duan, San Jose, CA (US);
Senh Thach, Union City, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method of creating a plasma-resistant thermal oxide coating on a surface of an article, where the article is comprised of a metal or metal alloy which is typically selected from the group consisting of yttrium, neodymium, samarium, terbium, dysprosium, erbium, ytterbium, scandium, hafnium, niobium or combinations thereof. The oxide coating is formed using a time-temperature profile which includes an initial rapid heating rage, followed by a gradual decrease in heating rate, to produce an oxide coating structure which is columnar in nature. The grain size of the crystals which make up the oxide coating is larger at the surface of the oxide coating than at the interface between the oxide coating and the metal or metal alloy substrate, and the oxide coating is in compression at the interface between the oxide coating and the metal or metal alloy substrate.