The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2014
Filed:
Feb. 21, 2012
Yu-hao Chien, Taipei, TW;
Hua-shu Wu, Hsinchu, TW;
Shih-yung Chung, Hsinchu County, TW;
Li-tien Tseng, Taoyuang County, TW;
Yu-te Yeh, Taichung County, TW;
Yu-Hao Chien, Taipei, TW;
Hua-Shu Wu, Hsinchu, TW;
Shih-Yung Chung, Hsinchu County, TW;
Li-Tien Tseng, Taoyuang County, TW;
Yu-Te Yeh, Taichung County, TW;
Miradia, Inc., Santa Clara, CA (US);
Abstract
A MEMS device comprises a substrate for manufacturing a moving MEMS component is divided into two electrically isolated conducting regions to allow the moving MEMS component and a circuit disposed on its surface to connect electrically with another substrate below respectively through their corresponding conducting regions, thereby the electrical conducting paths and manufacturing process can be simplified.