The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2014
Filed:
Jan. 17, 2014
Fei Corporation, Hillsboro, OR (US);
Johannes A. H. W. G. Persoon, Waalre, NL;
Andreas Theodorus Engelen, Eindhoven, NL;
Mathijs Petrus Wilhelmus van den Boogaard, Boxtel, NL;
Rudolf Johannes Peter Gerardus Schampers, Tegelen, NL;
Michael Frederick Hayles, Eindhoven, NL;
FEI Company, Hillsboro, OR (US);
Abstract
Described is a system and method for in situ sample preparation and imaging. The system includes a multi-axis stagehaving a bulk stageand a grid stagewith various degrees of freedom to allow for sample preparation. In some embodiments, a focused ion beam system is used to prepare a lamella on the bulk stage. The lamella can then be transferred to the grid stagefrom the bulk stagewithout needing to move the multi-axis stagefrom the focused ion beam system.