The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2014
Filed:
Oct. 30, 2012
International Business Machines Corporation, Armonk, NY (US);
Nathalie Casati, Adliswil, CH;
David DeMaris, Austin, TX (US);
Maria Gabrani, Thalwil, CH;
Ronald P. Luijten, Thalwil, CH;
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method of constructing a mask for use in semiconductor device manufacturing is disclosed. A first shape that is related to mask construction is selected from a set of shapes. A second shape related to the mask construction is selected from the set of shapes. The first shape and the second shape are represented using a first shape vector and a second shape vector, respectively. A cluster is formed that includes the first shape and the second shape when the first shape vector and the second shape vector are within a selected criterion.