The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2014
Filed:
Nov. 05, 2010
Applicants:
Le-tien Jung, Taipei, TW;
Yung-chang Lin, Taichung, TW;
Inventors:
Le-Tien Jung, Taipei, TW;
Yung-Chang Lin, Taichung, TW;
Assignee:
Taiwan Memory Corporation, Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/94 (2006.01);
U.S. Cl.
CPC ...
Abstract
The embodiment provides a buried bit line process and scheme. The buried bit line is disposed in a trench formed in a substrate. The buried bit line includes a diffusion region formed in a portion of the substrate adjacent the trench. A blocking layer is formed on a portion sidewall of the trench. A conductive plug is formed in the trench, covering sidewalls of the diffusion region and the blocking layer.