The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2014
Filed:
Jun. 03, 2013
Applicant:
Jeol Ltd., Tokyo, JP;
Inventors:
Mitsuru Yamada, Tokyo, JP;
Motohiro Nakamura, Tokyo, JP;
Assignee:
Jeol Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of axially aligning a charged particle beam involves an image data acquisition step and a calculation step. The image data acquisition step consists of obtaining first to third sets of image data by scanning a shielding member placed in the path of the beam with the beam while varying conditions of the excitation currents through first and second alignment coils, respectively. The calculation step consists of calculating the values of the excitation currents through the first and second alignment coils, respectively, for axial alignment of the beam, based on the obtained first to third sets of image data.