The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2014
Filed:
Jun. 15, 2011
Chi Hang Kwok, Hong Kong, CN;
Chi Wah Cheng, Hong Kong, CN;
Chi Hang Kwok, Hong Kong, CN;
Chi Wah Cheng, Hong Kong, CN;
ASM Technology Singapore Pte Ltd, Singapore, SG;
Abstract
An apparatusfor singulating an object is disclosed. The apparatuscomprises a laserconfigured to emit a laser beamwith a Gaussian irradiance profile, as well as a beam-shaping deviceconfigured to reshape the Gaussian irradiance profile of the laser beamemitted from the laser. In particular, the beam-shaping devicehas a plurality of aspherical lensesto redistribute irradiance of the laser beam, so as to reduce variation of the irradiance in an effective irradiation spectrum of the laser beamfor singulating the object. By redistributing the irradiance of the laser beam, irradiation energy may be more efficiently delivered to the semiconductor waferfor laser singulation, compared with conventional laser beams with Gaussian irradiance profiles which are non-uniform. A method of singulating an object is also disclosed.