The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 03, 2014

Filed:

Feb. 19, 2013
Applicant:

Semiconductor Manufacturing International Corp., Shanghai, CN;

Inventor:

Leo Liu, Shanghai, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract

A transistor and a method for forming the transistor are provided. The transistor can be formed over a substrate including a first region and second regions on opposite sides of the first region. On the substrate, a first SiGe layer can be formed, followed by forming a first silicon layer on the first SiGe layer and forming a second SiGe layer on the first silicon layer. The second SiGe layer and the first silicon layer within the second regions are removed. The first silicon layer within the first region is removed to form a cavity such that the second SiGe layer is floated. An isolating layer is formed in the cavity. Second silicon layers are formed in the second regions. A gate structure is formed on the second SiGe layer within the first region and the second silicon layers are doped to form a source and a drain.


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