The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2014
Filed:
Sep. 28, 2012
Applicants:
Elijah J. Thimsen, Chicago, IL (US);
Shannon C. Riha, Park Ridge, IL (US);
Alex B. F. Martinson, Woodridge, IL (US);
Jeffrey W. Elam, Elmhurst, IL (US);
Michael J. Pellin, Naperville, IL (US);
Inventors:
Elijah J. Thimsen, Chicago, IL (US);
Shannon C. Riha, Park Ridge, IL (US);
Alex B. F. Martinson, Woodridge, IL (US);
Jeffrey W. Elam, Elmhurst, IL (US);
Michael J. Pellin, Naperville, IL (US);
Assignee:
Uchicago Argonne, LLC, Chicago, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods and systems are provided for synthesis and deposition of chalcogenides (including CuZnSnS). Binary compounds, such as metal sulfides, can be deposited by alternating exposures of the substrate to a metal cation precursor and a chalcogen anion precursor with purge steps between.