The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2014
Filed:
May. 17, 2002
Nobuyuki Nagayama, Yamanashi, JP;
Hiroyuki Nakayama, Yamanashi, JP;
Kouji Mitsuhashi, Yamanashi, JP;
Nobuyuki Nagayama, Yamanashi, JP;
Hiroyuki Nakayama, Yamanashi, JP;
Kouji Mitsuhashi, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A plasma treatment container internal member, which is used in a plasma treatment container for performing a process on an object to be treated by plasma, includes an anodic oxide coating formed on a surface of a base material of the plasma treatment container internal member by an anodic oxidation treatment using plasma discharge, and a thermally sprayed film formed on the anodic oxide coating. The anodic oxidation treatment includes immersing the base material in an alkaline organic solvent, and performing the plasma discharge in the alkaline organic solvent.