The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 27, 2014

Filed:

Apr. 24, 2013
Applicants:

Commissariat À L' Énergie Atomique ET Aux Énergies Alternatives, Paris, FR;

Nanotools Gmbh, Munich, DE;

Inventors:

Johann Foucher, Voreppe, FR;

Bernd Irmer, Munich, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 40/00 (2010.01); G01Q 40/02 (2010.01); G01Q 70/08 (2010.01); G01Q 90/00 (2010.01);
U.S. Cl.
CPC ...
G01Q 40/00 (2013.01); G01Q 40/02 (2013.01); G01Q 70/08 (2013.01); G01Q 90/00 (2013.01);
Abstract

A structure for the characterization of a tip of an atomic force microscope, the structure being produced on a substrate and including a first support element located above the substrate; a first characterization element with a constant thickness, the first characterization element being located above the first support element and having an upper flat surface and a lower flat surface covering the upper surface of the first support element with two zones extending beyond the upper surface of the first support element, each zone having a characterization surface at one end which is capable of coming into contact with a tip to be characterized, the upper surface and the lower surface of said first characterization element being parallel to the upper surface of the substrate.


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