The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2014
Filed:
Oct. 15, 2010
Hiroyuki Nagasaka, Kumagaya, JP;
Soichi Owa, Kumagaya, JP;
Yasufumi Nishii, Kumagaya, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An exposure apparatus includes a projection optical system by which an image of a pattern is projected onto a substrate to expose the substrate. The apparatus also includes a liquid supply system having a supply port from which a liquid is supplied to a space under the projection optical system. A supply amount of the liquid per unit time from the supply port is changed without stopping the liquid supply from the supply port, and the supply amount of the liquid per unit time from the supply port in a first operation is different from the supply amount of the liquid per unit time from the supply port in a second operation that is different from the first operation.