The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2014
Filed:
Dec. 28, 2009
Masashi Kubo, Kanagawa, JP;
Makoto Kikuchi, Kanagawa, JP;
Kazuya Saito, Chiba, JP;
Miwa Watai, Chiba, JP;
Miho Shimizu, Chiba, JP;
Masashi Kubo, Kanagawa, JP;
Makoto Kikuchi, Kanagawa, JP;
Kazuya Saito, Chiba, JP;
Miwa Watai, Chiba, JP;
Miho Shimizu, Chiba, JP;
ULVAC, Inc., Kanagawa, JP;
Abstract
The challenge for the present invention is to provide a film-forming method and for forming a passivation film which can sufficiently inhibit the loss of carriers due to their recombination; and a method for manufacturing a solar cell element with the use of the method or the device. The film-forming device comprises a mounting portionfor mounting a film-forming object, a high frequency power source, and a shower platewhich is provided to face the film-forming object S mounted on the mounting portion, which introduces a film-forming gas, and to which the high frequency power source is connected and a high frequency voltage is applied. A low frequency power sourcefor applying a low frequency voltage is connected to the shower plate or the mounting portion mounting a substrate. The film-forming method is performed using the film-forming device, and the film-forming method is carried out in forming a passivation film.