The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2014
Filed:
Dec. 20, 2010
Lipyeow Yap, Sunnyvale, CA (US);
Jay Dedontney, Prunedale, CA (US);
Shouqian Shao, Fremont, CA (US);
Jason Wright, Saratoga, CA (US);
Lipyeow Yap, Sunnyvale, CA (US);
Jay DeDontney, Prunedale, CA (US);
Shouqian Shao, Fremont, CA (US);
Jason Wright, Saratoga, CA (US);
Intermolecular, Inc., San Jose, CA (US);
Abstract
A top assembly for a processing chamber having a back plate and a hub is provided. The back plate has a first portion and a second portion. The first portion is connected to the second portion through a central region of the back plate, wherein a gap is defined between opposing surfaces of the first and second portions outside the central region. The first portion includes an embedded heating element. The hub is affixed to a top surface of the second portion of the back plate over the central region. The hub has a top surface with a plurality of channel openings defined within a central region of the hub and a bottom surface having a central extension with a plurality of channels defined therethrough. The bottom surface includes an annular extension spaced apart from the central extension.