The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2014
Filed:
Jul. 28, 2011
Thorbjörn Ebefors, Huddinge, SE;
Edvard Kälvesten, Hägersten, SE;
Peter Agren, Huddinge, SE;
Niklas Svedin, Stockholm, SE;
Thorbjörn Ebefors, Huddinge, SE;
Edvard Kälvesten, Hägersten, SE;
Peter Agren, Huddinge, SE;
Niklas Svedin, Stockholm, SE;
Silex Microsystems AB, Jarfalla, SE;
Abstract
A vent hole precursor structure () in an intermediate product for a semi-conductor device has delicate structures (), and said intermediate product has a cavity () with a pressure therein differing from the pressure of the surroundings. The intermediate product comprises a first wafer () in which there is formed a depression (). The first wafer is bonded to a second wafer () comprising a device layer () from which the structures () are to be made by etching. A hole or groove () having a predefined depth extends downwards into the device layer, such that the cavity () during etching is opened up before the etching procedure breaks through the device layer () to form the structures ().