Sample device for charged particle beam

Abstract

Provided is a sample device for a charged particle beam, which facilitates the delivery of a sample between an FIB and an SEM in an isolated atmosphere. An atmosphere isolation unitfor putting a lidon an atmosphere isolation sample holderisolated from the air and taking the lidoff the sample holder, is provided in a sample exchangerthat communicates with a sample chamberof the FIBor the SEM through a gate; and the lidis taken off only by pushing a sample exchange bar, and thereby only the sample holderis set in the sample chamber. The sample is loaded in the atmosphere isolation sample holderin an atmosphere isolated from the air, for example, in a vacuum, and then the sample is isolated from the outside air by putting the lidon the sample holder; the sample can be processed and observed in the FIBor the SEM only by pushing the sample exchange barin this state, and further, when the sample exchange baris pulled out, by putting the rid of the sample holder in the atmosphere isolation unit, the state of isolation between the sample and the outside air.