The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2014
Filed:
Apr. 26, 2013
Applicant:
Mks Instruments, Inc., Andover, MA (US);
Inventors:
Johannes Seiwart, Berlin, DE;
Ulrich Brammer, Berlin, DE;
Christiane Gottschalk, Berlin, DE;
Joachim Lohr, Berlin, DE;
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01F 3/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
Devices, systems, and methods employed in wet cleaning semiconductor devices are provided. In particular, systems that can deliver deionized water with the desired concentration of CO2 and methods of generating deionized water with a desired concentration of CO2 for use in wet cleaning of semiconductor devices are provided.