The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2014
Filed:
Jul. 22, 2009
Doron Meshulach, Ramat-Gan, IL;
Ido Dolev, Rehovot, IL;
Doron Meshulach, Ramat-Gan, IL;
Ido Dolev, Rehovot, IL;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
A method for characterizing a surface, consisting of dividing the surface into pixels which are characterized by a parameter variation and defining blocks of the surface as respective groups of the pixels. The pixels are irradiated in multiple scans over the surface with radiation having different first polarization states. At least part of the radiation returning from the pixels is analyzed using second polarization states, to generate processed returning radiation. For each scan, block signatures of the blocks are constructed using the processed returning radiation from the group of pixels in each block. Also for each scan, a block signature variation is determined using the respective block signatures of the blocks, and, in response to the block signature variation, one of the first polarization states and at least one of the second polarization states are selected for use in subsequent examination of a test object.